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Principle of operation

Attotech's pulse valves are driven by a piezo electric actuator on which a small poppet is tightened. It periodically opens and closes a 1 mm diameter pipe where the gas flows. The valves engineering process aims at keeping the moving parts as light as possible which makes opening times as short as 100 microseconds feasible. The piezo electric actuator can be controlled by our piezo driving system, DU001, in combination with a delay generator to precisely set the opening and closing times. The design allows quick exchange of the target, without affecting other settings. Attotech provides standard T-shaped cells with lengths ranging from 2 to 10 millimeters. Custom shaped targets can be provided on demand.

The GR001 pulse valve

Data sheet

Download datasheet for GR001 (pdf format)